Due to the launch of the TV backlight and general lighting market, the demand for high-brightness LEDs has increased, and the penetration rate of the LED TV market has accelerated. In 2010, it is expected to reach 20%-30%. LED lighting applications have moved from outdoor LED street lights to indoor lighting applications, and LED lighting business opportunities have brought infinite imagination to the industry. Affected by this, the market demand for MOCVD is expected to increase to 700-800 units in 2010, of which the demand for mainland China in 2010 is expected to reach 230 units, accounting for 23% of the global market share, and future demand will continue to grow substantially. . According to the analysis of the main factors of epitaxial cost, it can be found that more than 80% of the cost is affected by five factors: epitaxial size, return on investment, maintenance rate, product yield and MO source usage. Therefore, the future development trend of MOCVD equipment will be designed around how to improve equipment stability, improve product yield, and reduce material usage. Specifically, it is mainly for the following aspects: starting from the two aspects of improving product yield and productivity, reducing the extension cost; improving the stability of the machine; reducing the manual operation and human intervention while increasing the production capacity; developing the cost reduction and expanding A product that can reduce the amount of MO source used while producing capacity; develop a multi-cavity epitaxial furnace.